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MEMSnet Home: MEMS-Talk: spin coater vacuum path
spin coater vacuum path
2010-12-09
Jia Yao
2010-12-09
Andrew Sarangan
2010-12-09
Jia Yao
2010-12-09
Brad Cantos
2010-12-09
Gary Hillman
2010-12-10
Jia Yao
2010-12-10
Morrison, Richard H., Jr.
2010-12-10
Gary Hillman
2010-12-10
Jia Yao
2010-12-10
Shay
2010-12-09
Andrew Sarangan
2010-12-10
David Grove
2010-12-09
ZijianCao
2010-12-09
Jia Yao
2010-12-10
Huy
2010-12-13
Jia Yao
2010-12-14
Paul Grasso
spin coater vacuum path
Andrew Sarangan
2010-12-09
The most common problem I have encountered with the Laurell spinners
is a sticking valve due to photoresist build up. This valve is outside
the body so it is easy to remove and clean. If the valve is not the
problem, the vacuum supply itself could be the problem. Failing all
that, it could be a blockage in the motor shaft or tubes inside the
instrument, or possibly a faulty sensor. Try blowing some nitrogen
through the hole.


On Thu, Dec 9, 2010 at 12:32 PM, Jia Yao  wrote:
> Thank you Andrew for your suggestion. I have taken the parts out and had
> them cleaned but still it shows insufficient vaccum value v~6 or 7. What
> else could I possibly check? Thank you!
reply
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