Hey Binh,

another vote for Cr adhesion layer. Or you could try W-10Ti, if you
have such a target (works great as Au adhesion layer).

By the way, what is the thickness of this gold layer?

cheers

m

On 12/3/10, Andrew Sarangan  wrote:
> A thin layer of Cr helps the adhesion of Au. However, your peeling
> issue could be due to a number of other causes. How were these films
> produced - evaporation, magnetron, sputtering.. Mag sputtering under
> low pressure can lead to excessive compressive stress which can cause
> buckling delaminations. Evaporated films can have tensile stress and
> lead to void defects. Stresses can also develop due to absorption of
> moisture in evaporated films. You should be able to determine if the
> stress is compressive or tensile by examining the peeling regions.