I took the parts out in the pathway and cleaned them so it is less likely
that there is some blockage than leakage. Any good way to check the leakage?
And I confirmed that the external vacuum pump and the vacuum sensor on the
spin coater are all right.

Thank you.
Jia

On Thu, Dec 9, 2010 at 2:31 PM, Gary Hillman  wrote:

> Gentlemen, there are two factors possibly at work here.  One is that the
> vacuum passageway is blocked, the other is that it is leaking.
>
> Gary Hillman