Jia, while I am not familiar with the Laurel spinner I am familiar with
spinners in general, we make them.  There will be a seal somewhere and that
seal will of needs be a rotary seal and subject to wear.  Find that seal and
make sure it is not leaking. If it is re-place it. If it is not then there
might be a leak elsewhere but the most likely leak point is at the rotary
seal.

Gary
S-Cubed
PO Box 365
9 Mars Ct.
Montville, NJ 07039
phone 973-263-0640 ex 35
fax 973-263-8888


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Jia
Yao
Sent: Thursday, December 09, 2010 10:17 PM
To: General MEMS discussion
Subject: Re: [mems-talk] spin coater vacuum path


I took the parts out in the pathway and cleaned them so it is less likely
that there is some blockage than leakage. Any good way to check the leakage?
And I confirmed that the external vacuum pump and the vacuum sensor on the
spin coater are all right.

Thank you.
Jia