Jia,

Be sure to check the vacuum chuck to part o-ring as well. It's a simple
problem that's easy to overlook. You could always write Laurell
(www.laurell.com) and see what they have to say, they've been quite helpful
for us in the past.

David A. Grove
Luxel Corp.
www.luxel.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Jia Yao
Sent: Wednesday, December 08, 2010 4:33 PM
To: General MEMS discussion
Subject: [mems-talk] spin coater vacuum path

Hi all,

I am having problem with spin coater. At first there were some photoresist
going into the chuck all the way to the bottom so the program stopped
automatically after a couple of seconds of running. Also the platform was
very hard to rotate by hand. After I cleaned the pathway which has the
photoresist, the platform moves freely but the vaccum is showing
insufficient value. Is there something blocking the vacuum
somewhere? How could I possibly check the block?

Thank you very much!

Jia