Put some grease onto the back of the adaptor that is used to spin smaller
substrate then put the adaptor onto the substrate holder, place the wafer ontop
of the adaptor then turn on the vacuum to see if you can defeat the vacuum
interlock. If adaptor is not exist, remove the substrate holder to the point
that you can put your thumb onto shaft that connecting the substrate holder and
the vacuum inlet then turn on the vacuum button (there's an elbow joint @ the
bottom of the shaft that the substrate holder's connected to, this is where the
resist tend to accumulate) ..... remove the vacuum line, fill the shaft with
liquid, if liquid comes out of the vacuum inlet then you got no blockage.


huy


I took the parts out in the pathway and cleaned them so it is less likely
that there is some blockage than leakage. Any good way to check the leakage?
And I confirmed that the external vacuum pump and the vacuum sensor on the
spin coater are all right.

Thank you.
Jia