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MEMSnet Home: MEMS-Talk: SU-8 3000 vs 2000 adhesion
SU-8 3000 vs 2000 adhesion
2010-12-11
Mikael Evander
2010-12-11
Bill Moffat
2010-12-12
Mikael Evander
2010-12-12
Andrew Sarangan
2010-12-12
Gareth Jenkins
2010-12-13
Bill Moffat
2010-12-13
Bill Moffat
2010-12-13
Yifan Wu
2010-12-15
Adrian Papas
2011-01-28
Mikael Evander
2011-01-28
Andrew Sarangan
2011-01-28
Mikael Evander
2011-01-28
Andrew Sarangan
2011-01-28
Dietrich Lueerssen
SU-8 3000 vs 2000 adhesion
Mikael Evander
2010-12-12
Just to clarify, I haven't bought my SU-8 yet. A fellow lab member was kind
enough to let me test his 2000 formulation.

I know that HMDS isn't supposed to do very much for the 2000 formulation (but
help a bit in the 3000 formulation) and that there also is the AP300 adhesion
promotor that supposed to be nice.

So I guess my question really is what would be the best solution for adhesion on
glass and if I should order the 3000 or the 2000 formulation. I have seen the
numbers on microchem's hompage but they don't really tell me much. I would be
great if someone had done some similar structures on glass and could comment on
how much of an improvement you really get with the different
formulations/promotors.

thanks again and have a great weekend

/Mikael

----- Original Message -----
From: "Bill Moffat" 
To: "General MEMS discussion" 
Sent: Saturday, December 11, 2010 8:14:34 AM
Subject: Re: [mems-talk] SU-8 3000 vs 2000 adhesion

Mikael,

There are far better chemistries for adhesion for SU8 than
HMDS. In fact I do not think HMDS has any effect on SU8 chemistry.
When I get to work on Monday I will discuss with our senior process
engineer Ken Sautter and send some suggestions for better chemistry and
treatment.

Bill Moffat
reply
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