MEMS-talk

News	MEMSnet Home: MEMS-Talk: Adhesion problem during 7740 glass wafer wet etching process Adhesion problem during 7740 glass wafer wet etching process 2010-12-13 Xin Yan 2010-12-13 Zijian Cao 2010-12-13 Shay Kaplan 2010-12-14 Xin Yan 2010-12-13 Andrew Sarangan 2010-12-13 Mikael Evander 2010-12-14 Xin Yan 2010-12-14 Mikael Evander 2010-12-15 Xin Yan 2010-12-14 Xin Yan 2010-12-16 Andrew Sarangan 2010-12-15 Ned Flanders Adhesion problem during 7740 glass wafer wet etching process Xin Yan 2010-12-14 Thanks Shay, i'll try it later. On Mon, Dec 13, 2010 at 10:28 PM, Shay Kaplan wrote: > Try evaporate CrAU or magnetron sputtered CrAu. With 48% HF -- Yan Xin -Pen-Tung Sah MEMS Research Center, -Xiamen University, CHINA XMU HOME: http://memsc.xmu.edu.cn/mems_renchaiduiwu/XuYuan_Chen-Group/index_1.html reply
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