Hello,

We want to improve the pressure uniformity between top and bottom chucks in a
wafer bonding machine. In some articles graphite foil is recommended but we dont
know which kind of graphite foil is useful for this purpose. In market there are
different kinds of graphite foils like flexible, reinforced graphite foils etc.
can anyone point us to the kind of graphite foil (if possible also the vendor)
which should be used for the specific purpose of improving pressure uniformity.


Best Regards
Muhammad Muneeb