Hi,

and damn at once! I believe that this measurement was worthless. We used a
simple but precise LC-Meter, switchable from L- to C-measurement. We
measured an accurate value for the inductance. Then simply switching to
capacitor-measurement for obtaining capacitance. I don't think that this
worked well because we attached an inductor instead of a capacitor! But the
meter expected one! May anyone tell me please if I am wrong...
So I think we have to repeat the measurement of the capacitance by using a
signal generator and a scope. With the help of the resulting
LC-resonance-frequency I will get the value of the capacitor. And I don't
think that this will give a value of some 100nF. So a big sorry!

Chris

-----Ursprngliche Nachricht-----
Von: [email protected]
[mailto:[email protected]] Im Auftrag von
Ned Flanders
Gesendet: Donnerstag, 23. Dezember 2010 13:58
An: General MEMS discussion
Betreff: Re: [mems-talk] Parasitic capacitance of an LCP-based inductor

100nF? Are you sure? That sounds excessive.

Could you give us some fabrication details? Also, how exactly did you
measure this capacitance?


m