Tricia,

It does!  But in a complex manner.  I don't have the etch rate, but I
know from experience that the Ag undergoes some sort of chemical
reaction and then etches away.  It is slower than the etch rate of
silicon, but still fairly fast.

Regards,

Paul

On 1/7/2011 2:22 PM, Tricia Youngbull wrote:
> Does XeF2 etch Ag? Does anyone have etch rate data?
>
> Thank you

==================================
Paul Sunal, PhD
Senior MEMS Engineer

MEMS and Nanotechnology Exchange / CNRI
1895 Preston White Drive
Suite #100
Reston, VA  20191

Tel: 703.262.5323
Fax: 703.262.5367
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