Hi,

I'm also interested in purchasing this kind of chemical resistant trays, but to
RCA clean ~10 wafers simultaneously. The only company that we have found is
Tousimis, which have a wafer holder for 5 wafers. Do any of you know of any
other supplier?

About the wafer shipment box, do you know if it withstands RCA cleaning?
(H2O2:NH4OH:H2O and H2O2:ClH:H2O at 80ºC)

Thanks!

Enrique San Andrés.
UCM, Spain.

-----Mensaje original-----
De: Ivan Baturin [mailto:[email protected]]
Enviado el: jueves, 13 de enero de 2011 7:09
Para: 'General MEMS discussion'
Asunto: Re: [mems-talk] Single wafer wet processing tray/basket

Hello!

For this purpose we have just cut-off part of 25 wafers shipment box (leaving 1
or 2 slots)... it is made from something like HDPE and have removable top cover
and bottom part as well.
Box like this one: http://www.netmotion.com/graphics/oth/wafercase/can11a.jpg.
Hope this can help you, at least as temporary way.

Regards,
Ivan