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MEMSnet Home: MEMS-Talk: WC deposition
WC deposition
2011-01-12
Kuijpers, Peter
2011-01-13
jeff besterman
2011-01-15
Ned Flanders
2011-01-15
Nabhiraj Yalagoud
WC deposition
Ned Flanders
2011-01-15
It does seem like (LP) CVD would be the best option for such a thick
layer of tungsten carbide, though it makes me wonder about the
stresses. There's also an ALD process for WC, and I'm pretty sure
someone in Finland would be able to do it (the home of ALD and all),
but 5 um is really on the thick side for ALD.

In any case, I for one will be keeping an eye on this discussion, as I
could definitely use WC myself for a project or two.


m

On 1/12/11, Kuijpers, Peter  wrote:
> Hi all,
>
> Does anyone of you know a "place" where I can get a layer of
> app 5µm  WC. I think it is a CVD process.
>
> Looking forward to any feedback
>
> Peter Kuijpers
> Process Engineer
> Philips Innovation Services
> MiPlaza/TL group
> High Tech Campus 04-p5.12
> 5656 AE Eindhoven
> The Netherlands
> Phone: +31 402743667
> Mobile:+31 612507027, Mobex: +31 402798904
> Email: [email protected]
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