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MEMSnet Home: MEMS-Talk: Single wafer wet processing tray/basket
Single wafer wet processing tray/basket
2011-01-11
Xiaoning Wang
2011-01-11
Andrew Sarangan
2011-01-13
Ivan Baturin
2011-01-14
Enrique San Andrés Serrano
2011-01-14
Benjamin Gesemann
2011-01-15
Nabhiraj Yalagoud
Single wafer wet processing tray/basket
Nabhiraj Yalagoud
2011-01-15
You can simply have a teflon sheet cut to the size of the wafer and
sandwitch the wafer between two sheets and using nut bolts of teflon, you
can fasten the two sheets. Or to simplify, you can make a teflon CD cassette
and cut out required diameter holes on both the flaps.

Nabhiraj

On Fri, Jan 14, 2011 at 11:44 PM, Benjamin Gesemann <
[email protected]> wrote:

> Hello Enrique,
>
> the Wafer carriers from the transport boxes are made of pp. It is resistant
> to many chemicals, but has a density < 1. That means it floats in a process
> bath. You can get the same carriers as process carrier made of PFA (density
> >2) the standard carriers are for 25 Wafers. One supplier for example is
> entegris.
>
> Best regards,
> Ben
reply
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