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MEMSnet Home: MEMS-Talk: WC deposition
WC deposition
2011-01-12
Kuijpers, Peter
2011-01-13
jeff besterman
2011-01-15
Ned Flanders
2011-01-15
Nabhiraj Yalagoud
WC deposition
Nabhiraj Yalagoud
2011-01-15
WC of 5 micron thickness may curl due to stress. I think it is difficult
even by CVD.

Can multilayer be possible? one layer of WC and other layer say Cr and then
another layer of WC which would help release the stress as well as increase
the thickness.

Nabhiraj

On Sat, Jan 15, 2011 at 5:39 AM, Ned Flanders  wrote:

> It does seem like (LP) CVD would be the best option for such a thick
> layer of tungsten carbide, though it makes me wonder about the
> stresses. There's also an ALD process for WC, and I'm pretty sure
> someone in Finland would be able to do it (the home of ALD and all),
> but 5 um is really on the thick side for ALD.
>
> In any case, I for one will be keeping an eye on this discussion, as I
> could definitely use WC myself for a project or two.
>
>
> m
reply
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