Hello Xiaohui,

Take a look to this paper:
"Anti-adhesive layers on nickel stamps for nanoimprint lithography"
Microelectronic Engineering 73-74 (2004) 196-201

Regards,

Jorge Ramiro



-----Mensaje original-----
De: Xiaohui Lin [mailto:[email protected]]
Enviado el: miércoles, 19 de enero de 2011 17:20
Para: General MEMS discussion
Asunto: [mems-talk] Antistick layer for nanoimprinting

Hi:

    We are doing nanoimprinting using mold with Ni finish (all pattern are
in Ni). Could anyone suggest an anti-stick layer material that can render
the surface more hydrophobic?

Thanks.

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: [email protected]
Office: (512) 471-4349