Hello Arno,
Have you tried using adhesion promoter? (HMDS,...)
Best regards,
Edouard Duriau
CS-ABS Imaging Engineer
ASML
On Thu, Jan 20, 2011 at 1:56 PM, Steckenborn, Arno <
[email protected]> wrote:
> Hello,
>
> Has anyone experience in improved adhesion of photoresist on Gold-surfaces
> for plating of Gold ? After change of resist we experience poor adhesion and
> undergrowth followed by delamination and flaking.
>
> Thanks in advance
> Arno