Hi all,

My work is to make the biological sensor, in which the sensing part must be
immersed in the media solution for several days. I used the SU-8 2002, 2um
thickness, cover on the top of gold pad to create some electrodes and the
trouble comes.

SU-8 2002 seems not stable in the aqueous environment. Some SU-8 portions peeled
off and the gold pad might contact with the media solution at the unexpected
area. They made my electrical signal goes wrong.

Does anyone have experience in photoresist in aqueous environment ? Is there
another kind of photoresist can help  ?

Thank you for reading.

Binh Tran
MS Candidate - Nano System
Kyungwon University - Korea