A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RF-DC sputtering _ need some suggestion(s)
RF-DC sputtering _ need some suggestion(s)
2011-01-26
Yassine AEA
2011-01-26
Ruiz, Marcos Daniel (SENCOE)
2011-01-26
Yassine AEA
2011-01-26
Ruiz, Marcos Daniel (SENCOE)
2011-01-27
Brian Stahl
2011-01-28
Yassine AEA
2011-01-28
Ruiz, Marcos Daniel (SENCOE)
2011-01-26
Gary Hillman
2011-01-26
Shay
2011-01-26
Wilson, Thomas
2011-01-28
Yassine AEA
2011-01-28
Kagan Topalli
2011-01-28
Yassine AEA
2011-01-31
Yassine AEA
RF-DC sputtering _ need some suggestion(s)
Yassine AEA
2011-01-31
Hi Kagan,

Thanks a lot. Today , the first sample will be grown using all the
suggestions and ideas that all of you have proposed and hope that it will
work or at least will decrease the %O.

Thanks again to all of you,
Yassine, Ait El Aoud

On Fri, Jan 28, 2011 at 1:43 PM, Kagan Topalli <
[email protected]> wrote:

> Dear Yassine,
>
> It is partly mentioned by some other colleagues replying this post. I
> recommend to make longer pre-sputtering sessions "at higher powers" before
> opening the shutter. It helps to clean the surface of the target. It may
> improve the quality of the deposition. Dehydration of the substrates before
> sputter coating may also bring an improvement.
>
> Best,
> Kagan
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
MEMS Technology Review
Tanner EDA by Mentor Graphics
The Branford Group