~100 nm pattern on organic substrate by top-down route?
Meng Gang
2011-02-09
Dear all,
Is it possible to make ~100 nm pattern on organic substrate by
top-down route?
Can we draw pattern on organic substrate by EBL? (Cr layer was deposited
before spin coating electron resist to make sure the conductivity of
substrate. )
If it can work, can we transfer the EBL pattern to organic substrate by RIE?
Do you have the experience or good suggestion?
Thanks a lot!
Meng Gang