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MEMSnet Home: MEMS-Talk: metal deposition on SU-8
metal deposition on SU-8
2011-02-11
Sheng Zhang
2011-02-11
Ruiz, Marcos Daniel (SENCOE)
2011-02-12
Pramod Gupta
metal deposition on SU-8
Sheng Zhang
2011-02-11
Hi, All

I need to deposit (e-beam evaporation) Aluminum on SU-8 2002 (developed),
and there are subsequent patterning steps for aluminum. Is there anything I
need to watch out? Is there any tricks to improve adhesion? Any advice would
be greatly appreciated!

Thanks!
Sheng
reply
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