Hello everyone,

I got some information about the Bosch foundry process: It is a microsystem
activity within the Europractice program and is funded by the European
Community. ... The key element of surface micromaching up to know was the
deposition of polysilicon on top of a sacrificial layer. The Bosch process
features a polysilicon (Epipoly) thickness of 11um for the freestanding
structures.

I know there is a Bosch process in the deep silicon trench etching and it
has been licensed by Plasma Therm, STS,... .

Is there any relationship between the two Bosch processes? Are there a
couple of individual process items (for instance, depositon, etching,
doping, and so forth) in the Bosch foundy process?

Thanks in advance!

Yahong
------------------------
Yahong Yao
705K University Village
Columbia, MO 65203
Tel: (573)771-0382
Email:[email protected]


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