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Hello,=20
I have a general question about deep rie.=20
Can anybody give me an idea about possible feature size of deep rie?=20
I want to know the "minimum achievable" line width (trench and wall) vs. =
different depth with resonable roughness control.=20
It might be process dependent, which will=20
be an interesting issue for comparison.=20
Thanks a lot in advance.
Junghoon Lee
Micromanufacturing Lab. UCLA =20
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Hello,
I have a general question about deep =
rie.=20
Can anybody give me an idea about possible feature =
size of=20
deep rie?
I want to know the "minimum=20
achievable" line width (trench and wall) vs.
different depth with resonable =
roughness=20
control.
