A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Image Reversal resist
Image Reversal resist
2011-02-23
Xiaohui Lin
2011-02-23
Bill Moffat
2011-02-23
Wilson, Thomas
2011-02-24
Warren Dustin
2011-02-24
[email protected]
2011-02-24
Bill Moffat
Image Reversal resist
Bill Moffat
2011-02-24
If bt negative angle you mean overhang for lift off.  You can not
achieve it by using negative resist.  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of [email protected]
Sent: Wednesday, February 23, 2011 3:48 PM
To: Xiaohui Lin; General MEMS discussion
Subject: Re: [mems-talk] Image Reversal resist

Maybe you can choose SU-8 2005?

I think that if you choose any negative resist, you can perform negative
angle.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Harrick Plasma, Inc.
Mentor Graphics Corporation
MEMStaff Inc.