Useful information might be found in:

Bau, H. H. ; De Rooij, N. F. ; Kloeck, B.:
Sensors. A Comprehensive Survey. Vol. 7: Mechanical Sensors.
VCH Publishers Inc., New York (NY), 1994
ISBN 0-89573-79-9

Kindest regards

Matthias Schuenemann ([email protected])