Meny,

It is different.

RCA etchs metals while sulfuric peroxide oxidizes whatever it there on the
surface.

Shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Kabla
Meni
Sent: Monday, March 14, 2011 7:44 AM
To: [email protected]
Subject: [mems-talk] Pyrex and Borofloat glass wafer clean

Can anyone explain why Piranha solution is used for cleaning glass wafers?

Can we use RCA instead?

Regards,
Meni Kabla
Rafael