Dear all,

I am using photolithography and PDMS mold technique to get a PDMS mold.

I'm having some troubles when I peel off the PDMS mold from the SU-8 master.
Even a very careful handing I can not get a good PDMS mold. After peeling off,
the pattern on the PDMS mold is always broken.

The SU-8 master's smallest width is 10um. Is it feasible in theory?

Can anyone give me some suggestions?

Thank you in advance

Regards