Hi,

it may depend on how thick your PDMS is, the mixing ratio, and curing
temperature.

Can you provide more details?

Barbara

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>From      : [email protected]
To          : "mems-talk" [email protected]
Cc          :
Date      : Thu, 17 Mar 2011 11:57:20 +0800 (CST)
Subject : [mems-talk] PDMS mold peeling off process

> Dear all,
>
> I am using photolithography and PDMS mold technique to get a PDMS mold.
>
> I'm having some troubles when I peel off the PDMS mold from the SU-8 master.
Even a very careful handing I can not get a good PDMS mold. After peeling off,
the pattern on the PDMS mold is always broken.
>
> The SU-8 master's smallest width is 10um. Is it feasible in theory?
>
> Can anyone give me some suggestions?