Hi,
      They have used, FDTS(1 H,1H,2H,2H,
perflourodecyltrichlorosilane) for patterned SU 8 also. Its is a self
assembled monolayer, its its very less and in some range of 10-15nm
probably, not exactly sure. This will not have impact on the structure which
is going to be imprinted...in major scale. So you can try using it.. all the
best.

Righeira Carnegie



2011/3/17 Mikael Evander 

> I've peeled of patterns that were 20 um and very long so it should work.
> What I did, because I was having similar problems to you, was to coat the
> master in a thin Teflon layer and it then released beautifully. My master
> was all glass though so that may be easier ...
>
> /Mikael
>