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Etching of SiN
Etching of SiN
2011-03-24
kapil kumar jain
2011-03-24
antwi nimo
2011-03-24
Mark West
2011-03-24
Benjamin Gesemann
2011-03-25
ozgur celik
Etching of SiN
kapil kumar jain
2011-03-24
What is the optimum concentration of SiN etchant ? The thickness is of the order of 1000 A.
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