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MEMSnet Home: MEMS-Talk: PDMS stuck to hard mask
PDMS stuck to hard mask
2011-03-09
righeira carnegie
2011-03-09
Mohd.Yusuf
2011-03-09
Gareth Jenkins
2011-03-09
[email protected]
2011-03-24
righeira carnegie
PDMS stuck to hard mask
righeira carnegie
2011-03-24
Hi Yusuf,

              I contacted the person, in imec for the solvent, he actually
used it for dissolving uncured PDMS, I my case it is cured. So I think the
latest idea is to purchase dynasolve 210 for dissolving this cures PDMS. But
we will also try it with the solvent used for dissolving uncured PDMS as
well. I shall update with the results.

Cheers,
Righeira
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