Hi MEMSer...
I am try to do bonding Silicon to Silicon with thin E-gun evaporated
7740 glass layer...
Does anybody have such experience on this? Any suggestions?
Besides I can't find the target for this process , should I directly cut
the 7740 glass substrate as the target? Would this damage the E-gun chamber?
Or, any alternatives?
Thanks a lot,
Best regards,
____________________________________________
Jerry Lee
(Jia-Hong Lee)
Insitute of Applied Mechanics,
National Taiwan University
Taipei, Taiwan, ROC
e-mail:
[email protected][email protected]
"Try then error is better than no try"