Aarthi,

The O2 plasma descume in this case is more important than the hard bake. The
chrome etch is extremely selective to organic residue.

Regards,
Glenn

-----Original Message-----
From: Aarthi lavanya [mailto:[email protected]]
Sent: Wednesday, April 06, 2011 7:02 PM
To: [email protected]
Subject: [mems-talk] Silicon etch


Hi Glenn,

I did try baking, but in vain. Seed layer is indeed thick, just to
ensure the etchant goes thru.

Cheers
Aarthi