You should use cyclopentanone (CP) for dilution of the SU-8 2000 series.  IPA is
actually not compatible as a diluent for this material.

Mike


-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of 첸로
Sent: Wednesday, April 20, 2011 7:10 AM
To: mems-talk
Subject: [mems-talk] dilute SU-8 2075

Dear everyone,

I am using SU-8 2075 in photolithography. I want to get a thin film after spin
coating so i intend to use IPA to dilute su-8, but it does not work. Has anybody
encountered this problem?  How do you dilute the su-8?

Any suggestion will be highly appreciated.

Thanks in advance.
Regards