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MEMSnet Home: MEMS-Talk: Patterning UV Epoxy
Patterning UV Epoxy
2011-04-22
yasser sabry
2011-04-22
Mike Whitson
2011-04-22
yasser sabry
Patterning UV Epoxy
yasser sabry
2011-04-22
Hi all,

Does any one know a UV epoxy that can be spin coated on the wafer and patterned
using UV exposure and developed using any chemical?

I want to use to bond two wafers together and I have to pattern/etch it from
places of my structures.

Please if you know tell from where I can get it.

Thanks,
Yasser Sabry

Doctorant ESIEE

Cité Descartes,
2 Bd Blaise Pascal,
F-93162 Noisy-le-Grand Cedex, FRANCE
+33604488624
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