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------Original Message------
From: basar bolukbas 
To: mems litho 
ReplyTo: basar bolukbas 
[mems-talk] Air Bridge Fabrication
Apr 28, 2011 6:12 PM

Dear All,

I want to make a air bridge fabrication, but i have some problems.

When i spin-coat second resist layer on top of first one, my first layer is
dissolving due to second resist's resolvent i guess.  I couldn't solve this
problem even i tried different a lot of things.  So i couldn't make double photo
lithography.

Could you suggest some details to me?

I will be appreciate for your great support.

Thank you very much.
Best Regards.


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