I have problems with resist adhesion on oxides or nitrides with BOE if
I don't use HMDS. I can't comment on liquid priming since I always do
the vapor priming method. But I suspect this might be your main issue.
If your features are not too small, you can also try a PMGI
undercoating (Lift-off resist). They often tend to have greater
adhesion to dielectrics than the straight resist.



On Mon, May 9, 2011 at 10:21 AM, Bill Moffat
 wrote:
> When you say using HMDS, are you talking about wet HMDS which has
> adhesion problems or vapor prime?  Bill Moffat