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MEMSnet Home: MEMS-Talk: FOX (flowable oxide) as nanoimprint resist
FOX (flowable oxide) as nanoimprint resist
2011-05-13
righeira carnegie
FOX (flowable oxide) as nanoimprint resist
righeira carnegie
2011-05-13
Hi,
Has anyone used FOX x2 or FOX x1(flowable oxide) as nano imprint resist?

Could you please suggest me the spinning time, baking time, after spinning the
imprint pressure and the temperature while applying pressure?

Thank you for the help in advance.

Kind regards,
Righeira
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