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MEMSnet Home: MEMS-Talk: metal lift off problem
metal lift off problem
2011-05-23
崔林
2011-05-23
sangeeth kallatt
2011-05-23
Ruiz, Marcos Daniel (SENCOE)
2011-05-23
weiquan yang
2011-05-23
Gary Hillman
2011-05-23
Landobasa
2011-05-24
Ivan Baturin
2011-05-25
Hamood
metal lift off problem
崔林
2011-05-23
Hi,

     I am using the e-beam to pattern my sample,
the resulotion is not very high, just around 500nm, and my
sample is 10nm aluminum on sapphire.

    It is followed by sputtering 100nm metal aluminum.
    After that, I use the aceton to do the lift-off.

    My problem is that the metal did not peel off as expected. I
appreciate any advice.

    Thank you!
reply
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