A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: PDMS peel off problem
PDMS peel off problem
2011-05-26
Ali M. Koupaei
2011-05-26
osman omran
2011-05-26
Andrew Sarangan
2011-05-26
[email protected]
2011-05-27
righeira carnegie
2011-05-27
첸로
2011-05-27
Jonathan Abbott
PDMS peel off problem
[email protected]
2011-05-26
50 C overnight is way too long. 65 for an hour is usually the time.
Or RT if you leave it over night.

Hope this helps.

Petru

La data de , "Ali M. Koupaei"  a scris:
> Hello all!

> I made PDMS on a patterned silicon master; however after cross-linking at
> 50oC overnight, the PDMS film cannot be removed from the master uniform
> and nicely; in fact the master is gone and PDMS can only be removed
> partially so much so no patterned PDMS can be achieved.

> Does anyone have any idea how I can solve this problem and what is wrong
> with the master? As usual I am using a 10:1 ratio of elastomer to
> cross-linker. For another master I do not have the same problem and PDMS
> film can be thoroughly removed from the master and nothing remains on
> master.

> Thanks a lot!

> Ali
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
University Wafer
Tanner EDA by Mentor Graphics