HF works with Si wafers because it removes the hydrophilic oxide.  I would also
like to know how to do that with the Pt surfaces.

Dan

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Jie Zou
Sent: Thursday, June 02, 2011 8:54 AM
To: General MEMS discussion
Subject: Re: [mems-talk] dicing problem with silicon wafer

Doesn't HF do that for Si wafers? I don't know for the Pt surfaces.

Jie