Hello,
The following is the summary:
1. It is called a dry film photoresist
2. Used mainly in pc circuit board industry/flat pannel displays
3. 37-75 microns thick: depends on exact type
4. I have only found a negative version
5. Applied by: Lamination(applied pressure and heat), UV exposure,
aqueous developement solution
6. Resolution is large (nothing less than 100um)
7. Known Suppliers(there could be others):
LeaRonal {http://www.learonal.com} - someone thought the name was
"Ordyl Alpha"
Dupont is a supplier {http://www.dupont.com} - RISTON {EM100 or
4700 series}
Morton {http://www.morton.com} - Laminar
References:
V.L Spiering and al, Planarization and fabrication of bridges across deep
grooves or holes in silicon using a dry film photoresist followed by an etch
back. J.Micromech. Microeng. 1995 5 pp112 114
H.Lorenz and al, Low-cost technology for multilayer electroplated parts
using laminated dry film resist. Sensors and actuators A 53 (1996),
pp.364-368
full characterization in :
H.Lorenz, thèse 1770, (1998) bibliothèque de l'école polytechnique fédérale
de Lausanne (EPFL), Switzerland.
Web Sites:
http://www.thinktink.com
http://www.dupont.com/pcm/riston/index.html
http://www.dupont.com/pcm/techinfo/laminate/optimize.html
http://www.dupont.com/pcm/techinfo/laminate/hotroll.html
Thanks to:
"Hubert Lorenz"
"Vladimir Kutchoukov"
Yit-shun Leung Ki
Dean Neikirk
Claude Beaulieu
Mac McReynolds [email protected] (Charles R. Sullivan)
"Jason Tauscher"
"Shile"
"Patrick C.P.Cheung"
Ken Westra
"Adam Cohen"
-Angela Rasmussen
The George Washington University
The Institute of MEMS and VLSI Technologies