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MEMSnet Home: MEMS-Talk: make the su-8 surface flat
make the su-8 surface flat
2011-06-10
첸로
2011-06-10
Khaled Mohamed Ramadan
2011-06-10
Xiaohui Lin
2011-06-10
첸로
2011-06-10
Eric Johnston
2011-06-11
첸로
2011-06-11
dai truong
2011-06-12
gau s
2011-06-13
Shane GUO
2011-06-14
Khaled Mohamed Ramadan
2011-06-14
Shane GUO
2011-06-15
Gareth Jenkins
2011-06-15
Shane GUO
2011-06-16
첸로
2011-07-06
Le Hong Hanh
2011-07-12
Shane GUO
2011-07-16
Bill Moffat
make the su-8 surface flat
Shane GUO
2011-06-14
Hello,

The pulling back did not happen in softbake but before it after a long
relaxation. I used a rectangle silicon substrate. Usually the SU-8 retreats most
from the four edges of the substrate but extends and covers the corners. The
shape of the final SU-8 looks like a puddle surrounded by four concave lines.
The flatness is not that bad for the SU-8 puddle.


Cheers
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