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MEMSnet Home: MEMS-Talk: make the su-8 surface flat
make the su-8 surface flat
2011-06-10
첸로
2011-06-10
Khaled Mohamed Ramadan
2011-06-10
Xiaohui Lin
2011-06-10
첸로
2011-06-10
Eric Johnston
2011-06-11
첸로
2011-06-11
dai truong
2011-06-12
gau s
2011-06-13
Shane GUO
2011-06-14
Khaled Mohamed Ramadan
2011-06-14
Shane GUO
2011-06-15
Gareth Jenkins
2011-06-15
Shane GUO
2011-06-16
첸로
2011-07-06
Le Hong Hanh
2011-07-12
Shane GUO
2011-07-16
Bill Moffat
make the su-8 surface flat
Gareth Jenkins
2011-06-15
This could be a wafer prep issue.

Did you oxidise the wafer and thoroughly dehydrate? Oxygen plasma should do
both or use piranha (or conc. H2SO4) followed by 250C bake.

On 15 June 2011 00:35, Shane GUO  wrote:

> Hello,
>
> The pulling back did not happen in softbake but before it after a long
> relaxation. I used a rectangle silicon substrate. Usually the SU-8 retreats
> most from the four edges of the substrate but extends and covers the
> corners. The shape of the final SU-8 looks like a puddle surrounded by four
> concave lines. The flatness is not that bad for the SU-8 puddle.
>
>
> Cheers
reply
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