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MEMSnet Home: MEMS-Talk: glass facet polishing
glass facet polishing
2011-06-21
Xiaohui Lin
2011-06-22
Elina Kasman
glass facet polishing
Elina Kasman
2011-06-22
Xiaohui,

I wouldn't use polishing film on glass facets. Get some CeO2 slurry and a
non-woven pad (HS4/SU from Engis, for example, or Suba IV from Eminess) and
you ill get the polish you need. If you need extra buffing, a woven pad
(like HLM-4F from Engis) and some 3micron diamond slurry would do the trick.

Elina Kasman

Process Development Engineer, R&D
Engis Corporation
Click to visit our newly redesigned website www.engis.com
Phone: 1(847) 484-7225
E-mail: [email protected]
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