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MEMSnet Home: MEMS-Talk: wet etching of fused silica
wet etching of fused silica
2011-06-27
Kuijpers, Peter
2011-06-27
Mac McReynolds
wet etching of fused silica
Mac McReynolds
2011-06-27
Hi Peter,

Wet etching of fused silica is an isotropic process (etches horizontal at same
rate as vertical).  To the best of my knowledge it is impossible to achieve an
etch aspect ratio of 1:1 with wet chemistry in a non-crystalline material.

Mac
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