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MEMSnet Home: MEMS-Talk: Isotropic etching SiO2 with PMMA mask
Isotropic etching SiO2 with PMMA mask
2011-07-05
Judith Linacero Blanco
2011-07-05
righeira carnegie
2011-07-06
sangeeth kallatt
2011-07-12
Judith Linacero Blanco
Isotropic etching SiO2 with PMMA mask
Judith Linacero Blanco
2011-07-05
Hi at all,

Does anyone know how to etch the SiO2 (about100nm) with a PMMA mask by chemical
attack? Since I want to attack the SiO2 in all directions.

Best regards,
reply
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