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News	MEMSnet Home: MEMS-Talk: Isotropic etching SiO2 with PMMA mask Isotropic etching SiO2 with PMMA mask 2011-07-05 Judith Linacero Blanco 2011-07-05 righeira carnegie 2011-07-06 sangeeth kallatt 2011-07-12 Judith Linacero Blanco Isotropic etching SiO2 with PMMA mask Judith Linacero Blanco 2011-07-05 Hi at all, Does anyone know how to etch the SiO2 (about100nm) with a PMMA mask by chemical attack? Since I want to attack the SiO2 in all directions. Best regards, reply
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