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MEMSnet Home: MEMS-Talk: TMAH doesn't attack some of (100) silicon wafers
TMAH doesn't attack some of (100) silicon wafers
2011-07-06
胡小东
2011-07-06
Andrea Mazzolari
2011-07-06
UDDIPTA CHATTERJEE
2011-07-06
Morrison, Richard H., Jr.
TMAH doesn't attack some of (100) silicon wafers
UDDIPTA CHATTERJEE
2011-07-06
some native oxide!

On Wed, Jul 6, 2011 at 3:00 PM, 胡小东  wrote:

> Hi, all,
>
> While etching  (100) silicon wafers,  most of wafers were etched normally..
> But few of (100) silicon wafers of the same batch were not etched at the
> initial time. It seems that the initial reaction just didn't take place.
>
> Has anyone had this experience?
>
> Thanks!
reply
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