Hi all,

I tried 48% H2SO4 at 60C to etch Ti for about 6mins. It seems to work. The S1813
resist still remains there. However, after I use Remover PG to clean S1813
resist, the patterned Ti electrodes become very hard to observe. The colour of
Ti left on the substrate is quite light and almost invisible. I am wondering if
my etching time is too long or Remover PG can clean up Ti at the same time when
it cleans the resist?

Thank you in advance.