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MEMSnet Home: MEMS-Talk: make the su-8 surface flat
make the su-8 surface flat
2011-06-10
첸로
2011-06-10
Khaled Mohamed Ramadan
2011-06-10
Xiaohui Lin
2011-06-10
첸로
2011-06-10
Eric Johnston
2011-06-11
첸로
2011-06-11
dai truong
2011-06-12
gau s
2011-06-13
Shane GUO
2011-06-14
Khaled Mohamed Ramadan
2011-06-14
Shane GUO
2011-06-15
Gareth Jenkins
2011-06-15
Shane GUO
2011-06-16
첸로
2011-07-06
Le Hong Hanh
2011-07-12
Shane GUO
2011-07-16
Bill Moffat
make the su-8 surface flat
Bill Moffat
2011-07-16
Ues the YES technique.  Vacuum purges to promote dehydration followed by warm
Nitrogen to rewarm the areas cooled by the latent heat of evaporation.  At 1
Torr water honestly boils at -20 degrees C if you can avoid vacuum freezing.
Bill Moffat

________________________________________
From: [email protected] [mems-talk-
[email protected]] on behalf of Shane GUO
[[email protected]]
Sent: Tuesday, July 12, 2011 2:42 PM
To: [email protected]
Subject: Re: [mems-talk] make the su-8 surface flat

Hi all,

Gareth is correct. Dehydration is very important for my case. Because my last
wafer has another polymer layer beneath the SU-8 layer, I cannot bake the
substrate above 90C for dehydration. By using a clean wafer, baked at 200C for
15mins and treated by O2 plasma for 10mins, I spin coated SU-8(50) at 1500rpm
for a 80um thick film. The coated wafer was relaxed overnight and no pulling
back was observed. Surface was very flat (visually) as expected except for the
edge bead (around ~5mm wide for a 4inch wafer). I did not remove the edge bead
and it had no influence on me, since my feature size is relatively large.

Thank you all
reply
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